Trends in EUV Market (Researched in January 2021)

Language:
Japanese
Product Code No:
R63200402
Issued In:
2021/05
#of Pages:
42
Publication Cycle:
  
Format:
PDF
Geographic Coverage:
Japan
Industry:
Jump to the Japanese Page:
EUVの最新動向（2021年1月調査）

Price

30,000 yen ($206.90)
(excluding consumption tax)
60,000 yen ($413.79)
(excluding consumption tax)
90,000 yen ($620.69)
(excluding consumption tax)
* Equivalent value in US$ (Today's rate : $1= 145 yen , 2025/05/10 Japan)
*Scope of Each License Type

Coverage: (Product/service)

EUV

Research Content:

EUVL, which was the biggest difficulty, was finally adopted in the mass production process – development of the next-generation EUVL for the next target of 2 nm process is also progressing.

 

1. Adoption of EUVL in the Process of Mass Production

 

2. Characteristics of EUVL

2-1. Realization of Fine Drawing

2-2. Significant Increase of Throughput

2-3. Improvement of Fidelity to Mask Patterns

 

3. A Breakthrough to Achieve the Adoption of EUVL in Mass Production Process

 

4. Market Size Transition and Forecast

 

5. What Companies and Research Institutes Do

5-1. Ushio Inc.

5-2. Dai Nippon Printing Co., Ltd. (DNP)

5-3. Tokyo Institute of Technology

5-4. University of Hyogo

5-5. Hokkaido University

5-6. Lasertec Corporation

 

6. Future Prospects

Price

written in Japanese
30,000 yen ($206.90)
(excluding consumption tax)
60,000 yen ($413.79)
(excluding consumption tax)
90,000 yen ($620.69)
(excluding consumption tax)
* Equivalent value in US$ (Today's rate : $1= 145 yen , 2025/05/10 Japan)
*Scope of Each License Type