MEMS, MEMS materials, MEMS devices, MEMS fine processing technologies, MEMS system applications, MEMS foundry

Companies and R&D institutions studying MEMS, MEMS materials, MEMS devices, MEMS fine processing technologies, MEMS system applications, MEMS foundry

I   Overview

1. What is MEMS (Micro Electro Mechanical Systems)?
2. Underlying technology for MEMS
3. Traditional International Conferences Held in Series in Japan
   1) IEEE MEMS
   2) Transducers
   (International Conference on Solid-State Sensors, Actuators and Microsystems)
4. Market Size Forecast regarding MEMS
5. Efforts by Companies and R&D Institutions on MEMS
   1) NEDO
   2) Kyoto University
   3) Tohoku University　
   4) Ritsumeikan University
6. Future Perspectives on MEMS

II   Materials

1. MEMS and Materials
2. Materials Used for MEMS Other than Si
   1) Metals
   2) Semiconductors
   3) Ceramics
   4) Polymer
3. Market Size Transition and Forecast regarding MEMS Materials
4. Efforts by Companies and R&D Institutions on MEMS Materials
   1) Osaka University
   2) Business School of Kyoto University of Advanced Science
   3) Tokyo Institute of Technology
   4) Tohoku University
   5) University of Hyogo
   6) NIMS (National Institute for Material Science)
5. Future Perspectives on MEMS Materials

III   Fine Processing Technologies

1. What are Fine Processing Technologies for MEMS?
2. Kinds of Fine Processing Technologies for MEMS
   1) Thin Film Formation
   2) Lithography
   3) Etching
   4) Adhesive bonding
   5) 3D processing
   6) Assembly techniques
3. Market Size Forecast and Transition regarding Fine Processing Technologies for MEMS
4. Efforts by Companies and R&D Institutions on Fine Processing Technologies for MEMS
   1) Gunma University
   2) University of Electro-Communications
   3) Tottori University)
   4) Nagaoka University of Technology
   5) Nagoya University
   6) Niigata University
5. Challenges and Future Perspectives on Fine Processing Technologies for MEMS

IV   Devices

1. What are MEMS Devices
2. Kinds of MEMS Devices
   1) Sensors (pressure sensors, acceleration sensors, angular speed sensors (gyroscope sensors))
   2) Optical devices
   3) RF (Radio Frequency) devices)
   4) Power generation devices
   5) microfluidic devices
3. Market Size Forecast and Transition regarding MEMS Devices
4. Efforts by Companies and R&D Institutions on MEMS Devices
   1) Seiko Epson Corporation
   2) University of Tokyo
   3) Nihon University
   4) University of Hyogo
   5) MEMS-on Technologies Inc.
   6) Yokogawa Electric Corporation
   7) Ritsumeikan University
5. Future Perspectives on MEMS Devices

V   System Applications

1. What are MEMS System Applications?
2. MEMS System Applications
   1) Consumer products
   2) Automobiles
   3) Telecommunications
   4) Healthcare, Bio
3. Market Size Forecast and Transition regarding MEMS System Applications
4. Efforts by Companies and R&D Institutions on MEMS System Applications
   1) Kagawa University
   2) Business School of Kyoto University of Advanced Science
   3) Kyoto University
   4) University of Tokyo
   5) Tokyo City University
   6) Tohoku University
   7) Hiroshima City University
5. Future Perspectives on MEMS System Applications

VI   Foundry

1. What is MEMS Foundry?
2. Characteristics and Superiority of MEMS Foundry
3. Market Size Forecast and Transition regarding MEMS Foundry
4. Efforts by Companies and R&D Institutions on MEMS Foundry
   1) Yitoa Micro Technology Corporation
   2) Kyodo International Corporation
   3) KRI, Inc.
   4) CITIZEN FINEDEVICE CO.,LTD.
   5) YAMANAKA HUTECH CORPORATION
   6) Tokyo Institute of Technology
   7) Tohoku University
5. Future Perspectives on MEMS Foundry